RHe Microsystems  
HOME DOWNLOADS KONTAKT IMPRESSUM SITEMAP
UNTERNEHMEN PRODUKTE JOBS AKTUELLES PRESSE
Products > Technologies > Special Technologies > Wafer Sawing
Cicor | LiveSupport | English Deutsch














» Complex
   Superstructures

» Ceramic Processing
» Wafer Sawing





 

WAFER SAWING

 
DICING SERVICE FOR WAFERS UND CERAMICS

Materials
  • aluminium oxide
  • aluminium nitride
  • PZT-ceramics
  • quartz glass
  • glass
  • silicon
  • other material on request
Wafer dimensions
  • max. 6"
Wafer thickness
  • min. 200 µm (under it on request)
  • max. 750 µm
Dicing channel
  • silicon: min. 75 µm
  • other: min. 100 µm
Chipping
  • silicon: max. 10 µm
  • other: max. 50 µm
Tape
  • standard: 150 µm UV-Tape
  • blue tape
Delivery form
  • on tape/frame
  • waffle pack
Anwendung
  • rapid prototyping
  • handling of small lots

REMARKS
The dicing channel should be free of metallisation. It is not possible to saw the wafer in proper form if electroplated metallization with a thickness above 1 µm exists in the dicing channel.